Application of Magnetic Field in Silicon Integrated Circuit Manufacture 磁场在硅集成电路制造工艺中的应用
The sensitivity of the magnetic sensor integrated circuit is 2. 62 V/ T at the working frequency of 10 kHz. 在工作频率为10kHz时,磁敏传感器的灵敏度为2.62V/T。
The measurements of the sensor IC indicate that the noise-shaping works well by the synchronized sampling function. The sensitivity of the magnetic sensor integrated circuit is 2.62 V/ T at the working frequency of 20 kHz. 经过集成电路芯片的测试验证,同步取样模式具有较好的噪声校正功能,工作频率为20kHz时,磁敏传感器的灵敏度为2.62V/T。
Reactive ion beam etching technique has been effectively used to study and fabricate large-scale and ultra large scale integrated circuit, acoustic surface wave device, magnetic bubble device microwave device, integrated optical circuit, superconducting device, shimmer optical pattern etc. 反应离子束刻蚀技术已有效地用于研究和制造大规模和超大规模集成电路,声表面波器件,磁泡存储器,微波器件,集成光路,超导器件,闪烁光栅等。
A more effective technique is provided by analyzing the static and dynamic magnetic field, including analyzing and emulating the integrated Hall-effect sensing circuit. 通过对霍尔叶片传感器的磁路进行动、静态分析,并结合对集成霍尔敏感电路的分析与仿真,为设计和开发此类传感器提供了更有效的途径。
Measuring the distribution of magnetic field of solenoid with linear Holl integrated circuit 用线性霍耳集成电路测量螺线管中磁场分布